Semiconductor device and method for manufacturing the same

ABSTRACT

A semiconductor device wherein destruction of a sealing ring caused by cracking of an interlayer dielectric film is difficult to occur, as well as a method for manufacturing the semiconductor device, are provided. A first laminate comprises first interlayer dielectric films having a first mechanical strength. A second laminate comprises second interlayer dielectric films having a mechanical strength higher than the first mechanical strength. A first region includes first metallic layers and vias provided within the first laminate. A second region includes second metallic layers and vias provided within the second laminate. When seen in plan, the second region overlaps at least a part of the first region, is not coupled with the first region by vias, and sandwiches the second interlayer dielectric film between it and the first region.

CROSS-REFERENCE TO RELATED APPLICATIONS

The disclosure of Japanese Patent Application No. 2008-142872 filed onMay 30, 2008 including the specification, drawings and abstract isincorporated herein by reference in its entirety.

BACKGROUND OF THE INVENTION

The present invention relates to a semiconductor device and a method formanufacturing the same. Particularly, the present invention is concernedwith a semiconductor device having a sealing ring which surrounds a chipregion, as well as a method for manufacturing the semiconductor device.

There is known a semiconductor device having a sealing ring regionformed so as to surround a chip region in plan to prevent the entry ofwater into the chip region in which an electric circuit is formed. Thesealing ring region has a sealing ring formed on a substrate so as toextend in the thickness direction of the substrate. The sealing ringfunctions as a protection wall against water, whereby the entry of waterinto the chip region is suppressed.

There sometimes occurs a case where the sealing ring is destroyed in adicing process during manufacture of a semiconductor device. Thisdestruction phenomenon will be explained in regular order. First, thedicing operation causes chipping at an end portion of a substrate. Withthis chipping as a starting point, a crack is developed in an interlayerdielectric film formed on the substrate. When the crack reaches thesealing ring, there occurs destruction of the sealing ring. Once thisdestruction occurs, water is apt to get into the chip region, thusgiving rise to the problem that the reliability of the semiconductordevice is deteriorated.

This problem is more likely to occur when a low dielectric constant filmformed of a low-k material or ULK (Ultra Low-k) material is used as aninterlayer dielectric film to decrease parasitic capacitance. This isbecause the low-k or ULK material is low in mechanical strength andtherefore a crack is more likely to occur. For example, in case of usingYoung's modulus as an index of mechanical strength, Young's modulus ofSiO (silicon oxide), which is the material of a conventional interlayerdielectric film (non-low-k film), is 75 Gpa or so, while that of organicsilica glass, which is one of low-k materials, is about 10 to 25 GPa.ULK material, which is a material rendered porous for attaining a stilllower dielectric constant, has a smaller Young's modulus. Thus, in asemiconductor device using a low dielectric constant film, thedestruction problem of the sealing ring caused by cracking is morelikely to occur.

In a semiconductor device there often is adopted a configuration whereinon one interlayer dielectric film formed of a low dielectric constantmaterial there is disposed another interlayer dielectric film of ahigher mechanical strength. In this case, a crack developed in oneinterlayer dielectric film is difficult to expand into the otherinterlayer dielectric film having a higher mechanical strength.Consequently, the crack is difficult to advance upwards through thesemiconductor device and it is apt to advance in the intra-planedirection of the substrate in the interior of the semiconductor device.As a result, the crack reaches the sealing ring and hence thepossibility of the sealing ring being destroyed becomes still higher.

As described above, a crack developed in the interlayer dielectric filmexerts a bad influence on the reliability of the semiconductor device.In view of this point there have been proposed techniques forsuppressing the formation of a crack. For example, in JapaneseUnexamined Patent Publication No. 2004-153015 (Patent Literature 1) itis proposed to form a dummy pattern-forming region around a guard ring(sealing ring). The dummy pattern-forming region has plural dummypatterns in each of plural places in plan. The plural dummy patterns arearranged in the thickness direction and are rendered integral by viacoupling made in the thickness direction. According to the publication,since an interlayer dielectric film located near the dummy patterns canbe reinforced by via coupling, the occurrence of a crack in theinterlayer dielectric film is prevented.

[Patent Literature 1]

Japanese Unexamined Patent Publication No. 2004-153015

(FIGS. 1 to 3)

SUMMARY OF THE INVENTION

The technique disclosed in the above publication intends to prevent theoccurrence of a crack in the interlayer dielectric film. However, in adicing process, there often occurs a case where a large stress isdeveloped. Therefore, even if the technique disclosed in the abovepublication is applied, it is difficult to fully prevent the occurrenceof a crack in the interlayer dielectric film.

Once a crack is developed, the crack can expand like weaving beside thereinforced portion of the interlayer dielectric film. That is, the crackcan expand while sidestepping the dummy patterns rendered integral byvia coupling and can finally reach the sealing ring. As a result, therearises the problem that the sealing ring can be destroyed.

The present invention has been accomplished in view of theabove-mentioned problem and it is an object of the invention to providea semiconductor device wherein the destruction of a sealing ring causedby cracking of an interlayer dielectric film is difficult to occur, aswell as a method for manufacturing the semiconductor device.

In one aspect of the present invention there is provided a semiconductordevice comprising a chip region, a sealing ring region which surroundsthe chip region in plan, and a dummy region which surrounds an outerperiphery of the sealing ring region in plan. The dummy region comprisesa semiconductor substrate, first and second laminates, at least onefirst region, and at least one second region. The first laminate isprovided over the semiconductor substrate and includes a firstinterlayer dielectric film having a first mechanical strength. Thesecond laminate is provided over the first laminate and includes asecond interlayer dielectric film having a mechanical strength higherthan the first mechanical strength. The first region includes aplurality of first metallic layers which are provided within the firstlaminate so as to mutually overlap in plan and also includes vias formutually coupling the first metallic layers. The second region includesa plurality of second metallic layers which are provided within thesecond laminate so as to mutually overlap in plan and also includes viasfor mutually coupling the second metallic layers. The second regionoverlaps at least a part of the first region in plan, is not coupledwith the first region by vias, and sandwiches the second interlayerdielectric film between it and the first region.

In another aspect of the present invention there is provided asemiconductor device comprising a chip region, a sealing ring regionwhich surrounds the chip region in plan, and a dummy region whichsurrounds an outer periphery of the sealing ring region in plan. Thedummy region comprises a semiconductor substrate, first and secondlaminates, at least one first region, and at least one second region.The first laminate is provided over the semiconductor substrate andincludes a first interlayer dielectric film having a first mechanicalstrength. The second laminate is provided over the first laminate andincludes a second interlayer dielectric film having a mechanicalstrength higher than that of the first mechanical strength. The firstregion includes a plurality of first metallic layers which are providedwithin the first laminate so as to mutually overlap in plan. The secondregion includes a plurality of second metallic layers which are providedwithin the second laminate so as to mutually overlap in plan. The secondregion, in plan, is provided at a position deviated from the position ofthe first region so as to overlap a part of the first region and bespaced away from the sealing ring region.

In a further aspect of the present invention there is provided a methodfor manufacturing a semiconductor device, comprising the followingsteps.

There is formed a wafer comprising a chip region, a sealing ring regionwhich surrounds the chip region in plan, and a dummy region whichsurrounds an outer periphery of the sealing ring in plan. The wafer iscut along an outer periphery of the dummy region. The dummy regioncomprises a semiconductor substrate, first and second laminates, andfirst and second regions. The first laminate is provided over thesemiconductor substrate and includes a first interlayer dielectric filmhaving a first mechanical strength. The second laminate is provided overthe first laminate and includes a second interlayer dielectric filmhaving a mechanical strength higher than the first mechanical strength.The first region includes a plurality of first metallic layers which areprovided within the first laminate so as to mutually overlap in plan andalso includes vias for mutually coupling the first metallic layers. Thesecond region includes a plurality of second metallic layers which areprovided within the second laminate so as to mutually overlap in planand also includes vias for mutually coupling the second metallic layers.The second region overlaps at least a part of the first region in plan,is not coupled with the first region by vias, and sandwiches the secondinterlayer dielectric film between it and the first region.

In a still further aspect of the present invention there is provided amethod for manufacturing a semiconductor device, comprising thefollowing steps.

There is formed a wafer comprising a chip region, a sealing ring regionwhich surrounds the chip region, and a dummy region which surrounds anouter periphery of the sealing ring region. The wafer is cut along anouter periphery of the dummy region. The dummy region comprises asemiconductor substrate, first and second laminates, and first andsecond regions. The first laminate is provided over the semiconductorsubstrate and includes a first interlayer dielectric film having a firstmechanical strength. The second laminate is provided over the firstlaminate and includes a second interlayer dielectric film having amechanical strength higher than the first mechanical strength. The firstregion includes a plurality of first metallic layers which are providedwithin the first layer so as to mutually overlap in plan. The secondregion includes a plurality of second metallic layers which are providedwithin the second laminate so as to mutually overlap in plan. The secondregion, in plan, is provided at a position deviated from the position ofthe first region so as to overlap a part of the first region and bespaced away from the sealing ring region.

According to the semiconductor device in one aspect of the presentinvention described above, in part of the second laminate there isformed a portion wherein a dielectric film including the secondinterlayer dielectric film is sandwiched in between the first and secondregions. This portion has a small film thickness because it issandwiched in between the first and second regions, and is notreinforced by via coupling. Thus, this portion in the second laminate isapt to be cracked locally. In the presence of such an easily crackedportion, a crack is easier to be developed and expand from the firstlaminate including the first interlayer dielectric film of a lowmechanical strength to the second laminate including the secondinterlayer dielectric film of a higher mechanical strength. That is, acrack is easier to advance upwards and hence easier to advance upwardsthrough the semiconductor device before reaching the sealing ring.Consequently, the occurrence of destruction of the sealing ring causedby cracking is suppressed, so that a high reliability of thesemiconductor device is ensured.

According to the semiconductor device in another aspect of the presentinvention described above, the second region which closes from above theportion sandwiched in between the first and second regions is providedat a position deviated from the position of the first region so as to bespaced away from the sealing ring in plan. Therefore, a crack developedand expanded in this sandwiched portion can advance upwards at aposition spaced away from the sealing ring region without beingobstructed by the second region. As a result, it becomes easier for thecrack to advance upwards through the semiconductor device beforereaching the sealing ring. Thus, since the occurrence of destruction ofthe sealing ring caused by cracking is suppressed, a high reliability ofthe semiconductor device is ensured.

BRIEF DESCRIPTION OF THE DRAWINGS

FIG. 1 is a diagram showing schematically a planar layout of asemiconductor device according to a first embodiment of the presentinvention;

FIG. 2 is a schematic sectional view taken along line II-II in FIG. 1;

FIG. 3 is a sectional view showing schematically a cracked state in FIG.2;

FIG. 4 is a schematic sectional view taken along line IV-IV in FIG. 2;

FIG. 5 is a schematic sectional view taken along line V-V in FIG. 4;

FIG. 6 is a schematic sectional view taken along line VI-VI in FIG. 4;

FIG. 7 is a schematic sectional view taken along line VII-VII in FIG. 4;

FIG. 8 is a schematic diagram showing a planar layout of a metalliclayer provided within an interlayer insulating film in the semiconductordevice of the first embodiment;

FIG. 9 is a schematic diagram showing a planar layout of a first regionprovided within a first laminate in the semiconductor device of thefirst embodiment;

FIG. 10 is a schematic diagram showing a planar layout of a secondregion provided within a second laminate in the semiconductor device ofthe first embodiment;

FIG. 11 is a schematic diagram showing a planar layout of a third regionprovided within a third laminate in the semiconductor device of thefirst embodiment;

FIG. 12 is an enlarged diagram of the second region and the environsthereof shown in FIG. 5;

FIG. 13 is a schematic diagram showing a planar layout of a wafer usedin a method for manufacturing the semiconductor device according to thefirst embodiment;

FIG. 14 is a partial sectional view showing schematically a dicingprocess carried out in the method for producing the semiconductor deviceaccording to the first embodiment;

FIG. 15 is a schematic partial sectional view for explaining crackexpanding courses in a conventional semiconductor device;

FIG. 16 is a partial sectional view showing schematically an example ofa crack expanding course in the semiconductor device of the firstembodiment;

FIG. 17 is a partial sectional view showing schematically theconfiguration of a semiconductor device as a comparative example;

FIG. 18 is an overlapped diagram of both a schematic section taken alongline XVIII-XVIII in FIG. 17 and a crack expanding course in plan;

FIG. 19 is a partial sectional view showing schematically theconfiguration of a semiconductor device according to a second embodimentof the present invention;

FIG. 20 is a schematic sectional view taken along line XX-XX in FIG. 19;

FIG. 21 is a schematic sectional view taken along line XXI-XXI in FIG.20;

FIG. 22 is a schematic sectional view taken along line XXII-XXII in FIG.20;

FIG. 23 is a schematic sectional view taken along line XXIII-XXIII inFIG. 20;

FIG. 24 is a partial sectional view showing schematically an example ofa crack expanding course in the semiconductor device of the secondembodiment;

FIG. 25 is a partial sectional view showing schematically theconfiguration of a semiconductor device according to a third embodimentof the present invention;

FIG. 26 is a partial sectional view showing schematically theconfiguration of the semiconductor device of the third embodiment;

FIG. 27 is a partial sectional view showing schematically theconfiguration of the semiconductor device of the third embodiment;

FIG. 28 is a partial sectional view showing schematically an example ofa crack expanding course in the semiconductor device of the thirdembodiment;

FIG. 29 is a partial sectional view showing schematically theconfiguration of a semiconductor device according to a fourth embodimentof the present invention;

FIG. 30 is a schematic sectional view taken along line XXX-XXX in FIG.29;

FIG. 31 is a schematic sectional view taken along line XXXI-XXXI in FIG.29;

FIG. 32 is a schematic sectional view taken along line XXXII-XXXII inFIG. 29;

FIG. 33 is a partial sectional view showing schematically an example ofa crack expanding course in the semiconductor device of the fourthembodiment;

FIG. 34 is a partial sectional view showing schematically theconfiguration of a semiconductor device according to a fifth embodimentof the present invention;

FIG. 35 is a schematic sectional view taken along line XXXV-XXXV in FIG.34;

FIG. 36 is a schematic sectional view taken along line XXXVI-XXXVI inFIG. 34;

FIG. 37 is a schematic sectional view taken along line XXXVII-XXXVII inFIG. 34;

FIG. 38 is a partial sectional view showing schematically theconfiguration of a semiconductor device according to a sixth embodimentof the present invention;

FIG. 39 is a partial sectional view showing schematically theconfiguration of a semiconductor device according to the sixthembodiment of the present invention;

FIG. 40 is a partial sectional view showing schematically theconfiguration of the semiconductor device of the sixth embodiment;

FIG. 41 is a partial sectional view showing schematically theconfiguration of a semiconductor device according to a seventhembodiment of the present invention;

FIG. 42 is a schematic sectional view taken along line XLII-XLII in FIG.41;

FIG. 43 is a schematic sectional view taken along line XLIII-XLIII inFIG. 41;

FIG. 44 is a schematic sectional view taken along line XLIV-XLIV;

FIG. 45 is a partial sectional view showing schematically theconfiguration of a semiconductor device according to an eighthembodiment of the present invention;

FIG. 46 is a schematic sectional view taken along line XLVI-XLVI in FIG.45;

FIG. 47 is a schematic sectional view taken along line XLVII-XLVII inFIG. 45;

FIG. 48 is a schematic sectional view taken along line XLVIII-XLVIII inFIG. 45;

FIG. 49 is a partial sectional view showing schematically theconfiguration of a semiconductor device according to a ninth embodimentof the present invention;

FIG. 50 is a schematic sectional view taken along line L-L in FIG. 49;

FIG. 51 is a schematic sectional view taken along line LI-LI in FIG. 49;and

FIG. 52 is a schematic sectional view taken along line LII-LII in FIG.49.

DETAILED DESCRIPTION OF PREFERRED EMBODIMENTS

Embodiments of the present invention will be described below withreference to the accompanying drawings.

First Embodiment

First, with reference to FIGS. 1 to 3, a description will be given abouta schematic configuration of a semiconductor device embodying thepresent invention.

FIG. 1 is a diagram showing schematically a planar layout of asemiconductor device according to a first embodiment of the presentinvention. Referring to FIG. 1, the semiconductor device, indicated atSD1, according to this first embodiment includes a chip region CR, asealing ring region SR, and a dummy region DR, in a planar layout. Thesealing ring region SR surrounds the chip region CR when seen in plan.The dummy region DR surrounds an outer periphery of the sealing ringregion SR when seen in plan. Outer side faces of the dummy region DR aredicing faces DS which are cut faces in a dicing process.

FIG. 2 is a schematic sectional view taken along line II-II in FIG. 1.Referring to FIG. 2, the semiconductor device SD1 includes asemiconductor substrate SB, a semiconductor element 71, an elementisolation film 72, insulation films 73, 75, 76, contacts 74, wiring 77,a protective film 78, and layers M1 to M9. In the chip region CR, thesemiconductor element 71, which has a source/drain region 70, is formedon the semiconductor substrate SB. The protective film 78 is formed ofsilicon nitride. The contacts 74 are formed so as to extend through theinsulation film 73. The layers M1 to M9 are formed in this order on bothinsulation film 73 and contacts 74. Each of the layers M1 to M9 has ametal portion and an insulator portion. With the layers M1 to M9, anelectric circuit including the semiconductor element 71 is formed in thechip region CR, and a sealing ring SL is formed in the sealing ringregion SR. Further, an opening OP is formed in the protective film 78 insuch a form as extends in parallel with the sealing ring SL andsurrounds the sealing ring SL and so as to expose the insulation film76. The opening OP is for preventing the occurrence of destruction ofthe sealing ring SL and the wiring 77 caused by transmission of stressof a sealing material such as resin to the sealing ring and the wiringalong the protective film 78 which is a hard film at the time of sealingof the semiconductor device SD1 into a package. The opening OP furtherfunctions to prevent the occurrence of destruction of the sealing ringSL and the wiring 77 caused by transmission of stress related to dicingto the sealing ring and the wiring along the hard protective film 78when the protective film is cut in the dicing process during manufactureof the semiconductor device.

FIG. 3 is a sectional view showing schematically a cracked state in FIG.2. Referring to FIG. 3, there sometimes is a case where thesemiconductor device SD1 has a chipping TP and a crack CK which areattributable to the dicing process in the manufacture of thesemiconductor device. The chipping TP occurs at a side face of thesemiconductor substrate SB. With the chipping TP as a starting point,the crack CK advances upwards (to the protective film 78 side) in thedummy region DR of the semiconductor device SD1. That is, the crack CKoccurs only within the dummy region DR and does not reach the sealingring SL provided in the sealing ring region SR. Thus, the sealing ringSL is not damaged by the crack CK and retains its function of preventingthe entry of water into the chip region CR, whereby the semiconductordevice SD1 possesses a high reliability.

A more detailed description will now be given about the configuration ofthe semiconductor device SD1. Referring mainly to FIGS. 2 and 5, indesigning a wiring structure of the semiconductor device SD1, the layersM1 to M9, forming a multilayer wiring structure, is treated in aclassified manner into a portion comprising the layer M1, a portioncomprising the layers M2 to M5, a portion comprising the layers M6 andM7, and a portion comprising the layers M8 and M9. For each of theportions there are selected the material and size rule of an interlayerdielectric film.

An interlayer dielectric film ID0 as an insulator portion in the layerM1 is formed of a non-low-k material such as SiO or a low-k materialsuch as SiOC. The layer M1 has a function as a local wiring forconstituting a basic circuit including the semiconductor element 71 inthe chip region CR. Also, the layer M1 has a metal portion as part ofthe sealing ring SL in the sealing ring region SR. Further, the layer M1has a metal layer L0 in the dummy region DR. The metal layer L0 isformed in the interlayer dielectric film ID0 by a single damasceneprocess. As shown in FIG. 8, a planar layout of the metal layer L0 is asquare shape having a one side length-of LW0. The length LW0 is, forexample, 1.5 μm.

The layers M2 to M5 have a first laminate LB1 as an insulator portion.The first laminate LB1 is a laminate in which an etching stopper filmES1 a, a first interlayer dielectric film ID1 a, a cap film CP1 a, anetching stopper film ES1 b, a first interlayer dielectric film ID1 b, acap film CP1 b, an etching stopper film ES1 c, a first interlayerdielectric film ID1 c, a cap film CP1 c, an etching stopper film ES1 d,a first interlayer dielectric film ID1 d, and a cap film CP1 d, arelaminated in this order. The material of the first interlayer dielectricfilms ID1 a to ID1 d is a ULK material having a smaller relativedielectric constant and a lower mechanical strength than those of thematerial of the interlayer dielectric film ID0. The etching stopperfilms ES1 a to ES1 d are formed of SiCO/SiCN laminate material. Thematerial of the cap films CP1 a to CP1 d is SiOC.

The layers M2 to M5 have metal portions formed by a dual damasceneprocess. The metal portions each have a function as an intermediatewiring on a local wiring in the chip region CR. The metal portionsconstitute a part of the sealing ring SL in the sealing ring region SR.In the dummy region DR the metal portions constitute first regions Ra1provided within the first laminate LB1.

The first regions Ra1 have a plurality of first metallic layers L1 whichare formed within the first laminate LB1 so as to overlap each other inplan and also have vias V1 for coupling the first metallic layers L1. Asshown in FIG. 9, a planar layout of each first region Ra1 comprises asquare having a one side length of LW1 and corresponding to the firstmetallic layers L1 and squares having a one side length of LV1 andcorresponding to the vias V1. The squares corresponding to the vias V1are arranged plurally along the outer periphery portion of the squarecorresponding to the first metallic layers L1. The length LW1 is equalto the length LW0 (FIG. 8) and is, for example, 1.5 μm. In the drawing,for example, the length SV1 is 0.12 μm and the length SW1 is 0.05 μm.When seen in plan, the vias V1 are arranged on the periphery of eachfirst metallic layer L1 along the four sides of the first metallic layer(this layout will hereinafter be referred to as the “via V1 peripherylayout”).

The layers M6 and M7 have a second laminate LB2 as an insulator portion.The second laminate LB2 is a laminate in which an etching stopper filmES2 a, a second interlayer dielectric film ID2 a, an etching stopperfilm ES2 b, and a second interlayer dielectric film ID2 b, are laminatedin this order. The material of the second interlayer dielectric filmsID2 a and ID2 b is a low-k material having a larger relative dielectricconstant and a higher mechanical strength than those of the ULK materialof the first interlayer dielectric films ID1 a to ID1 d. For example, itis SiOC. The etching stopper films ES2 a and ES2 b are formed ofSiCO/SiCN laminate material.

The layers M6 and M7 have metal portions formed by a dual damasceneprocess. The metal portions each function as a first semiglobal wiringon the intermediate wiring in the chip region CR. Also, the metalportions constitute a part of the sealing ring SL in the sealing ringregion SR. Further, the metal portions constitute second regions Ra2provided within the second laminate LB2 in the dummy region DR.

The second regions Ra2 include a plurality of second metallic layers L2which are provided within the second laminate LB2 so as to overlap eachother in plan and also include vias V2 for coupling the second metalliclayers L2. As shown in FIG. 10, a planar layout of each second regionRa2 comprises a square having a one side length of LW2 and correspondingto the second metallic layers L2 and squares having a one side length ofLV2 and corresponding to the vias V2. The squares corresponding to thevias are arranged plurally along the outer periphery portion of thesquare corresponding to the second metallic layers L2. The length LW2 isequal to each of the lengths LW0 (FIG. 8) and LW1 (FIG. 9) and is, forexample, 1.5 μm. In the drawing, for example, the length SV2 is 0.18 μmand the length SW2 is 0.065 μm. When seen in plan, the vias V2 arearranged on the periphery of each second metallic layer L2 along thefour sides of the second metallic layer (this layout will hereinafter bereferred to as the “via V2 periphery layout”).

The second regions Ra2 overlap the first regions Ra1 in plan. The secondregions Ra2 are not coupled through vias to the first regions Ra1 andthey sandwich a second interlayer dielectric film ID2 a between them andthe first regions Ra1.

The layers M8 and M9 have a third laminate LB3 as an insulator portion.The third laminate LB3 is a laminate in which an etching stopper filmES3 a, a third interlayer dielectric film ID3 a, an etching stopper filmES3 b, a third interlayer dielectric film ID3 b, an etching stopper filmES3 c, a third interlayer dielectric film ID3 c, an etching stopper filmES3 d, and a third interlayer dielectric film ID3 d, are laminated inthis order. The material of the third interlayer dielectric films ID3 ato ID3 d is a non-low-k material, e.g., SiO, having a larger relativedielectric constant and a higher mechanical strength than those of thelow-k material of the second interlayer dielectric films ID2 a and ID2b. The etching stopper films ES3 a to ES3 d are formed of SiCO/SiCNlaminate material or SiCN single layer material.

The layers M8 and M9 have metal portions formed by a dual damasceneprocess. The metal portions each function as a second semiglobal wiringon the first semiglobal wiring in the chip region CR. Also, the metalportions constitute a part of the sealing ring SL in the sealing ringregion SR. Further, the metal portions constitute third regions Ra3provided within the third laminate LB3 in the dummy region DR.

The third regions Ra3 include a plurality of third metallic layers L3which are provided within the third laminate LB3 so as to overlap eachother in plan and also include vias V3 for coupling the third metalliclayers L3. As shown in FIG. 11, a planar layout of each third region Ra3comprises a square having a one side length of LW3 and corresponding tothe third metallic layers L3 and squares having a one side length of LV3and corresponding to the vias V3. The squares corresponding to the viasV3 are arranged plurally along the outer periphery portion of the squarecorresponding to the third metallic layers L3. The length LW3 is equalto each of the lengths LW0 to LW2 (FIGS. 8 to 10) and is, for example,1.5 μm. In the drawing, for example, the length SV3 is 0.68 μm and thelength SW3 is 0.5 μm. When seen in plan, the vias V3 are arranged on theperiphery of each third metallic layer L3 along the four sides of thethird metallic layer (this layout will hereinafter be referred to as the“via V3 periphery layout”).

The third regions Ra3 overlap the second regions Ra2 in plan. The thirdregions Ra3 are not coupled through vias to the second regions Ra2 andthey sandwich a third interlayer dielectric film ID3 a between them andthe second regions Ra2.

Referring mainly to FIG. 4, the third regions Ra3, when seen in plan,have an occupancy area ranging from 30% to 50% in the dummy region DRand have a pattern ranging from 1 to 4 square micrometers. The firstregions Ra1 and the second regions Ra2 also have the same occupancy areaand area pattern.

The third regions Ra3 are arranged regularly in plan. In the extendingdirection of the sealing ring SL the third regions Ra3 are arrangedlinearly at equal intervals. In a direction (the lateral direction inFIG. 4) orthogonal to the extending direction of the sealing ring SL thethird regions Ra3 are arranged in a zigzag fashion at equal intervals.In other words, the third regions Ra3 formed in adjacent rows areshifted by a predetermined pitch from each other. More particularly,when seen in plan, the third regions Ra3 are arranged along plural rowsand the third regions Ra3 positioned in adjacent rows are arranged in analternate manner, thus affording the zigzag arrangement. With thiszigzag arrangement, the sealing ring SL and the dicing faces DS areprevented from being linearly coupled together through an interlayerdielectric film in the direction orthogonal to the extending directionof the sealing ring SL. This layout is also true of the first and secondregions Ra1, Ra2.

The metal portions of the layers M1 to M9 include barrier metal portionspositioned at bottom and side face portions and Cu (copper) portionscovered with the barrier metal portions. For example, as shown in FIG.12, each second region Ra2 includes barrier metal portions BMa, BMb andCu portions CLa, CLb.

Just under the opening OP, the first, second and third regions Ra1, Ra2,Ra3 may be omitted. In this case, the state of peeling of an interlayerdielectric film caused by chipping TP to be described later can beobserved more easily by an automatic visual inspection apparatus. Thus,there accrues an effect that the analysis of defect becomes easier.

The following description is now provided about a method formanufacturing the semiconductor device SD1. FIG. 13 is a diagram showingschematically a planar layout of a wafer which is used in a method formanufacturing the semiconductor device according to the first embodimentof the present invention. Referring to FIG. 13, first a wafer WF isformed by a conventional wafer process. The wafer WF includes, in aplanar layout, a plurality of semiconductor devices SD1 and a cuttingregion RR. Each semiconductor device SD1, in a planar layout, includes achip region CR, a sealing ring region SR which surrounds the chip regionCR, and a dummy region DR which surrounds the outer periphery of thesealing ring region SR.

FIG. 14 is a partial sectional view showing schematically a dicingprocess in the method for manufacturing the semiconductor deviceaccording to the first embodiment. Referring to FIG. 14, a dicing bladeDB is pushed against the cutting region RR, whereby the wafer WF is cutalong the outer periphery of the dummy region DR. The semiconductordevices SD1 are cut out from the wafer WF by this dicing process.

A detailed description will now be given about an expanding course of acrack which can be developed in the dicing process. First a generalconsideration will be given about the crack expanding course. FIG. 15 isa schematic partial sectional view for explaining a crack expandingcourse in a conventional semiconductor device.

Referring to FIG. 15, the conventional semiconductor device SDO includesa semiconductor substrate SB, an insulation film FL formed on thesemiconductor substrate SB, and a sealing ring SL formed within theinsulation film FL. In a dicing process in this semiconductor device SDOmanufacturing method, there may occur chipping TP on a dicing face DSside of the semiconductor substrate SB. In this case, with the chippingTP as a starting point, such a stress as expands a crack upwards isapplied to the insulation film FL. The crack in the insulation film FLinduced by the stress is classified, in an early stage of the crack,into three types of cracks CK1, CK2 and CK3.

The crack CK1 tends to expand approximately just above the semiconductorsubstrate SB. Since the crack CK1 expands without approaching thesealing ring region SR, it does not cause destruction of the sealingring SL. On the other hand, the crack CK3 passes the dummy region DRobliquely upwards and tends to advance toward the sealing ring regionSR. The crack CK3 is likely to reach and destroy the sealing ring SL.

The crack CK2 passes only the dummy region DR obliquely upwards andtends to leave the semiconductor device SDO. In the case where theinsulation film FL has an approximately uniform mechanical strength, thecrack CK2 maintains its initial-stage course, passes only the dummyregion DR obliquely upwards and leaves the semiconductor device SDO.However, in the case where the insulation film FL has such a laminatestructure as is higher in mechanical strength toward the upper portion,the upward advancing of the crack is obstructed halfway and may changeinto a crack CK2V (a broken line arrow in the drawing) having anadvancing course toward the sealing ring SL. As examples of such alaminate structure are mentioned a structure in which a film formed of alow-k material is laminated onto a film formed of a ULK material and astructure in which a film formed of a non-low-k material is laminatedonto a film formed of a low-k material. In the semiconductor devicehaving such a laminate structure there is the possibility the sealingring SL may be destroyed by the crack CK2V.

The following description is now provided about an example of an actualcrack expanding course in the case where a stress tending to generatethe crack CK2 (FIG. 15) is applied to the semiconductor device SD1. Ifit is assumed that the first to third regions Ra1 to Ra3 are notprovided, then it is possible that the crack CK will change into thecrack CK2V (FIG. 15) and that the crack CK2V will reach the sealing ringSL, between the first and second laminates LB1, LB2 or between thesecond and third laminates LB2, LB3. In this embodiment, however, acrack is conducted upwards through the semiconductor device SD1 beforereaching the sealing ring SL. A detailed description will be given belowabout this crack expanding course.

Referring to FIG. 16, as an initial stage, a crack passes the interlayerdielectric film ID0, the etching stopper film ES1 a and the firstinterlayer dielectric film ID1 a and reaches the bottom of the firstregion Ra1, like an arrow, a.

Then, like an arrow, b, the crack advancing course changes to a lateraldirection along the bottom of the first region Ra1. This is because thecrack cannot advance into the first regions Ra1 which have a highmechanical strength due to being formed of metal, but advances along aninterface between the first regions Ra1 and the first interlayerdielectric film ID1 a. Besides, the interface is low in adhesionstrength because it is a metal-insulator interface. Due to this lowadhesion strength the crack's tendency to advancing along this interfaceincreases.

Then, like an arrow, c, the advancing course of the crack which haspassed the bottom of a first region Ra1 returns to the obliquely upwardcourse (the advancing direction of the crack CK2 in FIG. 15) which isthe original course proportional to the state of stress. The crackpasses the cap film CP1 a, etching stopper film ES1 b, first interlayerdielectric film ID1 b, cap film CP1 b, etching stopper film ES1 c, firstinterlayer dielectric film ID1 c, cap film CP1 c, etching stopper filmES1 d, first interlayer dielectric film ID1 d, and cap film CP1 d, andreaches the bottom of the second laminate LB2. The crack is less likelyto pass between the first metallic layers L1 in the first region Ra1immediately adjacent to the arrow, c, on the sealing ring SL side (leftside in the drawing). The reason is that the region between a pair offirst metallic layers L1 opposed to each other is reinforced by vias V1and that therefore a crack is difficult to occur therein.

Then, like an arrow, d, the crack advancing course changes to a lateraldirection along an interface between the first and second laminates LB1,LB2. That is, the crack is difficult to advance upwards in the drawing.This is because the region above the arrow, d, is large in theinsulation film thickness and the mechanical strength in materialcharacteristics is high. Further, since the interface corresponds to aCMP (Chemical Mechanical Polishing) surface in the dual damasceneprocess for forming the first regions Ra1, the interfacial strength isrelatively low, with the result that the crack's tendency to advancingalong this interface increases.

Then, like an arrow, e, in the region sandwiched in between the firstand second regions Ra1, Ra2, the crack advances into the second laminateLB2. This is because the insulation film thickness is small in theregion sandwiched in between the first and second regions Ra1, Ra2, thusfacilitating generation of a crack. The advancing course of the crackhaving thus entered into the second laminate LB2 returns to theobliquely upward course (the advancing direction of the crack CK2 inFIG. 15) which is the original course proportional to the state ofstress. Then, the crack passes the etching stopper film ES2 a and thesecond interlayer dielectric film ID2 a and reaches the bottom of asecond region Ra2.

As indicated with arrows f to i, the crack advances like the abovearrows b to e, and as indicated with arrows j and k, the crack advanceslike the above arrows b and c. That is, in the dummy region DR the crackadvances upwards through the semiconductor device SD1 without reachingthe sealing ring region SR. As a result, the crack CK (FIG. 3) is formedin the semiconductor device SD1.

When a stress intending to generate the crack CK2 (FIG. 15) is appliedto the semiconductor device SD1 of this embodiment, the occurrence ofthe crack CK2V (FIG. 15) which reaches the sealing ring SL is preventedand instead there is developed within the dummy region DR such a crackCK (FIG. 3) as advancing upwards through the semiconductor device SD1.Moreover, with the via V1 periphery layout, via V2 periphery layout andvia V3 periphery layout, the crack is difficult to advance through theinteriors of the first to third regions Ra1 to Ra3, thus permitting thecrack to escape upwards more effectively.

The same as above is also true of the case where such a stress asintends to generate the crack CK3 (FIG. 15) is applied to thesemiconductor device SD1.

The following description is now provided about a comparative example inconnection with this embodiment. FIG. 17 is a partial sectional viewshowing schematically the configuration of a comparative semiconductordevice. Referring to FIG. 17, the comparative semiconductor device,indicated at SDC, has regions RaC as metal portions. The regions RaCeach include a first metallic layer L0, a first region Ra1, a secondregion Ra2, a third region Ra3, and vias V1C, V2C and V3C. With the viasV1C, V2C and V3C, the metallic layer L0 and the first, second and thirdregions Ra1, Ra2, Ra3 are rendered integral with one another. Therefore,each region RaC is present as a mass of region difficult to be cracked.

FIG. 18 is an overlapped diagram of both a schematic section taken alongline XVIII-XVIII in FIG. 17 and a crack advancing course in plan.Referring mainly to FIG. 18, the regions RaC are difficult to be crackedas noted above and are formed so as to pass in the thickness directionthrough a laminate LB including an interlayer dielectric film ID0 andfurther including a first laminate LB1 to a third laminate LB3 (FIG.17). Therefore, a crack indicated with an arrow in the figure cannot getinto the regions RaC. As a result, the crack may advance through themore easily cracked laminate LB rather than through the regions RaC likeweaving beside the regions RaC. The crack is likely to teach the sealingring SL and destroy the same ring.

According to the semiconductor device SD1 of this embodiment, as shownin FIG. 16, in part of the second laminate LB2 there is formed a portion(for example the surrounding portion of the arrow, e) in which adielectric film including the second interlayer dielectric film ID2 a issandwiched in between the first and second regions Ra1, Ra2. Thisportion has a small film thickness because it is sandwiched in betweenthe regions Ra1 and Ra2. Besides, this portion is not reinforced byvias. Therefore, this portion is easy to be cracked locally in thesecond laminate LB2. In the presence of this easily cracked portion, acrack is apt to expand from the first laminate LB1 having the firstinterlayer dielectric films ID1 a to ID1 d of a low mechanical strengthto the second laminate LB2 having the second interlayer dielectric filmsID2 a, ID2 b of a high mechanical strength, as indicated with arrow, e.Consequently, it becomes easier for the crack to escape upwards throughthe semiconductor device SD1 before reaching the sealing ring SL. As aresult, destruction of the sealing ring SL by the crack is suppressedand hence a high reliability of the semiconductor device SD1 is ensured.

Like the third regions Ra3 shown in FIG. 4, the first and second regionsRa1, Ra2 each occupy an area ranging from 30% to 50% in plan, wherebythe cracked regions indicated with arrows, c and e, (FIG. 16) areensured in a well-balance manner, so that the crack can be conductedupwards through the semiconductor device SD1 as shown in FIG. 16.

The metallic layer L0 and the first, second and third regions Ra1, Ra2,Ra3 (FIGS. 8 to 11) each have a pattern of an area ranging from 1 to 4square micrometers in plan.

In the case where the metallic layer L0 and the first, second and thirdregions Ra1, Ra2, Ra3 are scattered at the time of cutting with thedicing blade DB (FIG. 4) in the dicing process, if the aforesaid area is4 square micrometers or less, the area of this metallic piece is almostequal to the sectional area of abrasive grains which are used in a largequantity in the dicing process. Therefore, this metallic piece scarcelycauses any substantial bad effect. If the aforesaid area is smaller than1 square micrometer, the area of the region for generating the crack ofarrow, e, (FIG. 16) becomes insufficient and hence the action ofconducting the crack upwards decreases.

On the other hand, if the area in question exceeds 4 square micrometers,the actually machined area with abrasive grains at the time of cuttingby the dicing blade DB (FIG. 14) in the dicing process becomes largebecause the area of this metallic piece is larger than the sectionalarea of abrasive grains which are used in a large quantity in the dicingprocess. Consequently, cutting burrs are formed, causing deteriorationin reliability of the semiconductor device, or cutting chips adhere tothe dicing blade, causing a cutting defect.

The semiconductor device SD1 has the interlayer dielectric film ID0(FIG. 5) higher in mechanical strength than the first interlayerdielectric films ID1 a to ID1 d (FIG. 5), so in the layer M1 (FIG. 2)there is used an interlayer dielectric film material higher inmechanical strength than the layers M2 to M5 (FIG. 2). Therefore, it ispossible to adopt such a combination of interlayer dielectric filmmaterials as is usually adopted for some reason in the design of thesemiconductor device SD1. For example, there may be adopted acombination such that the interlayer dielectric film ID0 is formed of alow-k material and the first interlayer dielectric films ID1 a to ID1 dare formed of a ULK material. Or, there may be adopted a combinationsuch that the interlayer dielectric film ID0 is formed of a non-low-kmaterial and the first interlayer dielectric films ID1 a to ID1 d areformed of a low-k material.

Unlike the comparative semiconductor device SDC (FIG. 17) thesemiconductor device SD1 (FIG. 5) of this embodiment does not have viasV1C, V2C and V3C and hence the semiconductor device designing work is somuch simplified.

In a direction (the lateral direction in FIG. 4) orthogonal to theextending direction of the sealing ring SL, as shown in FIG. 4, thirdregions Ra3 are arranged in a zigzag fashion, whereby the occurrence ofa crack which is rectilinear in the direction (the lateral direction inthe figure) orthogonal to the extending direction of the sealing ring SLand which does not undergo the action of the third rings Ra3, betweenthe sealing ring SL and the dicing face DS, is suppressed. This is alsotrue of the first and second regions Ra1, Ra2.

Second Embodiment

FIG. 19 is a partial sectional view showing schematically theconfiguration of a semiconductor device according to a second embodimentof the present invention. FIG. 20 is a schematic sectional view takenalong line XX-XX in FIG. 19. FIGS. 21 to 23 are schematic sectionalviews taken along lines XXI-XXI, XXII-XXII, and XXIII-XXIII,respectively, in FIG. 20. Sectional positions of FIGS. 20 to 23correspond to FIGS. 4 to 7, respectively, in the first embodiment.

Referring mainly to FIGS. 20 to 23, the semiconductor device, indicatedat SD2, of this second embodiment includes first, second and thirdregions Rb1, Rb2, Rb3 instead of the first, second and third regionsRa1, Ra2, Ra3, respectively, used in the semiconductor device SD1 (FIG.5). The first, second and third regions Rb1, Rb2, Rb3 do not have a via.

The second regions Rb2, when seen in plan, partially overlap the firstregions Rb1 and are located at positions deviated from the positions ofthe first regions Rb1 so as to be away from the sealing ring region SR.The third regions Rb3, when seen in plan, partially overlap the secondregions Rb2 and are located at positions deviated from the secondregions Rb2 so as to be away from the sealing ring region SR.

As to the other points in configuration than the above points, they arealmost the same as in the configuration of the above first embodiment.Therefore, the same or corresponding elements are identified by the samereference numerals as in the first embodiment and explanations thereofwill be omitted.

FIG. 24 is a partial sectional view showing schematically an example ofa crack advancing course in the semiconductor device of the secondembodiment. FIG. 24 corresponds to FIG. 16 in the first embodiment.

In FIG. 24, when seen in plan, the second regions Rb2 which close fromabove the portion sandwiched in between the first and second regionsRb1, Rb2 are provided at positions deviated from the positions of thefirst regions Rb1 so as to be away from the sealing ring SL. Therefore,a crack of arrow, f, expanding in this sandwiched portion can advanceupwards (see arrow, g,) without being obstructed by the second regionsRb2 at a position (a right-hand position in the figure) spaced moredistant from the sealing ring region SR.

Likewise, when seen in plan, the third regions Rb3 which close fromabove the portion sandwiched in between the second and third regionsRb2, Rb3 are provided at positions deviated from the positions of thesecond regions Rb2 so as to be away from the sealing ring SL. Therefore,a crack of arrow, j, expanding in this sandwiched portion can advanceupwards (see arrow, k) without being obstructed by the third regions Rb3at a position (a right-hand position in the figure) spaced more distantfrom the sealing ring region SR.

Accordingly, as compared with the case where the position of each secondregion Rb2 and that of each third region Rb3 are not deviated from eachother in plan, a crack is easier to advance upwards through thesemiconductor device SD2 before reaching the sealing ring SL.Consequently, the occurrence of destruction of the sealing ring SL bycracking is suppressed and hence a high reliability of the semiconductordevice SD2 is ensured.

Third Embodiment

FIGS. 25 to 27 are partial sectional views showing schematically asemiconductor device according to a third embodiment of the presentinvention. Sectional positions of FIGS. 25 to 27 correspond to those ofFIGS. 21 to 23, respectively, in the second embodiment.

Referring mainly to FIG. 25 to 27, the semiconductor device, indicatedat SD3, of this third embodiment includes first, second and thirdregions Ra1, Ra2, Ra3 instead of the first, second and third regionsRb1, Rb2, Rb3, respectively, used in the semiconductor device SD2 (FIG.21) of the second embodiment.

As to the other points in configuration than the above, they are almostthe same as in the above second embodiment. Therefore, the same orcorresponding elements are identified by the same reference numerals asin the second embodiment and explanations thereof will be omitted.

FIG. 28 is a partial sectional view showing schematically an example ofa crack advancing course in the semiconductor device of the thirdembodiment. FIG. 28 corresponds to FIG. 24 in the second embodiment.

Referring to FIG. 28, the second regions Ra2 which close from above theportion sandwiched in between the first and second regions Ra1, Ra2 areprovided at positions deviated from the positions of the first regionsRa1 so as to be away from the sealing ring SL. Therefore, a crack ofarrow, f, expanded in this portion can advance upwards (see arrow, g)without being obstructed by the second regions Ra2 at a position (aright-hand position in the figure) more distant from the seal ringregion SR.

Likewise, the third regions Ra3 which close from above the portionsandwiched in between the second and third regions Ra2, Ra3 are providedat positions deviated from the positions of the second regions Ra2 so asto be away from the sealing ring SL. Therefore, a crack of arrow, j,expanded in this portion can advance upwards (see arrow, k) withoutbeing obstructed by the third regions Ra3 at a position (a right-handposition in the figure) more distant from the sealing ring region SR.

Thus, as compared with the case where the position of each second regionRa2 and that of each third region Ra3 are not deviated from each other,a crack is easier to advance upwards through the semiconductor deviceSD3. Consequently, the occurrence of destruction of the sealing ring SLby cracking is suppressed and hence a high reliability of thesemiconductor device SD3 is ensured.

A plurality of first metallic layers L1 in each first region Ra1 arecoupled together by vias V1. Consequently, a crack is difficult to bedeveloped in the region between a pair of first metallic layers L1opposed to each other because the region is reinforced by vias V1. Thus,it is less possible that a crack will pass between the first metalliclayers L1 in the first region positioned immediately adjacent to thearrow, c, on the sealing SL side (left side in the drawing). That is, asindicated with arrow, c, the crack can be conducted more positively upto the upper end of the first laminate LB1. Accordingly, as indicatedwith arrow, e, a crack expanded into the second laminate LB2 over thefirst laminate LB1 can be developed at a position (a right-hand positionin the drawing) more distant from the sealing ring region SR.

A plurality of second metallic layers L2 in each second region Ra2 arecoupled together by vias V2. Consequently, a crack is difficult to bedeveloped in the region between a pair of second metallic layers L2opposed to each other because the region is reinforced by vias V2.Therefore, it is less possible that a crack will pass between the secondmetallic layers L2 in the second region Ra2 positioned immediatelyadjacent to the arrow, g, on the sealing ring SL side (left side in thedrawing). That is, as indicated with arrow, g, the crack can beconducted more positively up to the upper end of the second laminateLB2. Thus, as indicated with arrow, i, a crack expanded into the thirdlaminate LB3 over the second laminate LB2 can be developed at a position(a right-hand position in the drawing) more distant from the sealingring region SR.

Further, a plurality of third metallic layers L3 in each third regionRa3 are coupled together by vias V3. Therefore, a crack is difficult tobe developed in the region between a pair of third metallic layers L3opposed to each other because the region is reinforced by vias V3.Therefore, it is less possible that a crack will pass between the thirdmetallic layers L3 in the third region Ra3 positioned immediatelyadjacent to the arrow, k, on the sealing ring SL side (left side in thedrawing). That is, as indicated with arrow, k, the crack can beconducted more positively up to the upper end of the third laminate LB3.Thus, it is possible to let the crack pass upwards through thesemiconductor device SD3 at a position (a right-hand position in thedrawing) more distant from the sealing ring region SR.

Fourth Embodiment

FIG. 29 is a partial sectional view showing schematically theconfiguration of a semiconductor device according to a fourth embodimentof the present invention. FIGS. 30 to 32 are schematic sectional viewstaken along lines XXX-XXX, XXXI-XXXI, and XXXII-XXXII, respectively, inFIG. 29. Sectional positions of FIGS. 29 to 32 correspond to FIGS. 4 to7, respectively, in the first embodiment.

Referring mainly to FIG. 29, in the semiconductor device, indicated atSD4, of this fourth embodiment, a planar layout of third regions Ra3comprises individual patterns arranged in a zigzag fashion at equalintervals in principle in a direction (the lateral direction in FIG. 29)orthogonal to the extending direction of a sealing ring SL. However, inthe region defined by broken lines DC, a portion of the patterns aredropped out halfway in the layout, with third regions Ra3 being notformed therein.

Also as to planar layouts of first and second regions Ra1, Ra2, they arethe same as the above planar layout of the third regions Ra3.

As to the other points in configuration than the above, they are almostthe same as in the first embodiment. Therefore, as to the same orcorresponding elements, they are identified by the same referencenumerals as in the first embodiment and explanations thereof will beomitted.

FIG. 33 is a partial sectional view showing schematically an example ofa crack advancing course in the semiconductor device of this fourthembodiment. FIG. 33 corresponds to FIG. 16 in the first embodiment.

Referring mainly to FIG. 33, in this embodiment, as compared with thefirst embodiment (FIG. 16), the spacing between a first region Ra1located over an arrow, b, and a first region Ra1 adjacent thereto on thesealing ring SL side (left side in the figure) is large. That is, thereis ensured a sufficient distance between a crack of the arrow, b, andthe underside of a first region Ra1 which is spaced away from the crackin the sealing ring SL direction (leftwards in the figure), i.e., aneasily cracked surface. Consequently, an immediate expansion of thecrack of arrow, b, to the underside of he first region Ra1 located onthe sealing ring SL side (left side in the figure), i.e., a lateralexpansion of the crack instead of advancing in the direction of arrow,c, is suppressed. That is, as indicated with arrow, c, the crack can beconducted more positively up to the upper end of the first laminate LB1.Thus, it is possible to let the crack advance upwards through thesemiconductor device SD4 in a positive manner.

Fifth Embodiment

FIG. 34 is a partial sectional view showing schematically theconfiguration of a semiconductor device according to a fifth embodimentof the present invention. FIGS. 35 to 37 are schematic sectional viewstaken along lines XXXV-XXXV, XXXVI-XXXVI, and XXXVII-XXXVII,respectively, in FIG. 34. Sectional positions of FIGS. 34 to 37correspond to FIGS. 20 to 23, respectively, in the second embodiment.

Referring mainly to FIG. 34, a planar layout of third regions Rb3comprises individual patterns arranged in a zigzag fashion at equalintervals in principle in a direction (the lateral direction in FIG. 34)orthogonal to the extending direction of the sealing ring SL. However,in the region defined by broken lines DC, a portion of the patterns aredropped out halfway in the layout, with third regions Rb3 being notformed therein.

Also as to planar layouts of first and second regions Rb1, Rb2, they arethe same as the above planar layout of the third regions Rb3, with aportion of the patterns being dropped out halfway in each layout.

As to the other points in configuration than the above, they are almostthe same as in the above second embodiment. Therefore, as to the same orcorresponding elements, they are identified by the same referencenumerals as in the second embodiment and explanations thereof will beomitted.

According to this embodiment, as in the fourth embodiment, it ispossible to conduct a crack upwards more positively in the regiondefined by the broken lines DC (FIG. 34). Thus, it is possible to letthe crack advance upwards through the semiconductor device SD5 in a morepositive manner.

Sixth Embodiment

FIGS. 38 to 40 are partial sectional views showing schematically theconfiguration of a semiconductor device according to a sixth embodimentof the present invention. Sectional positions of FIGS. 38 to 40correspond to FIGS. 35 to 37, respectively, in the fifth embodiment.

Referring mainly to FIGS. 38 to 40, the semiconductor device, indicatedat SD6, of this sixth embodiment includes first, second and thirdregions Ra1, Ra2, Ra3 instead of the first, second and third regionsRb1, Rb2 and Rb3, respectively, used in the semiconductor device SD5(FIGS. 35 to 37) of the fifth embodiment.

As to the other points in configuration than the above, they are almostthe same as in the fifth embodiment. Therefore, as to the same orcorresponding elements, they are identified by the same referencenumerals and explanations thereof will be omitted.

According to this sixth embodiment there is obtained the same effect asin the fifth embodiment. A plurality of first metallic layers L1 in eachfirst region Ra1 are coupled together by vias V1. The region between apair of first metallic layers L1 opposed to each other is difficult tobe cracked because it is reinforced by vias V1. Consequently, it becomesless possible that a crack will pass between opposed first metalliclayers L1 in each first region Ra1. Thus, it is possible to conduct acrack more positively up to the upper end of the first laminate LB1.

A plurality of second metallic layers L2 in each second region Ra2 arecoupled together by vias V2. The region between a pair of secondmetallic layers L2 opposed to each other is difficult to be crackedbecause it is reinforced by vias V2. Consequently, it becomes lesspossible that a crack will pass between opposed second metallic layersL2 in each second region Ra2. Thus, it is possible to conduct a crackmore positively up to the upper end of the second laminate LB2.

A plurality of third metallic layers L3 in each third region are coupledtogether by vias V3. The region between a pair of third metallic layersL3 opposed to each other is difficult to be cracked because it isreinforced by vias V3. Consequently, it is less possible that a crackwill pass between opposed third metallic layers L3 in each third regionRa3. Thus, it is possible to let a crack advance upwards through thesemiconductor device SD6 at a position (a right-hand position in thedrawing) more distant from the sealing ring region SR.

Seventh Embodiment

FIG. 41 is a partial sectional view showing schematically theconfiguration of a semiconductor device according to a seventhembodiment of the present invention. FIGS. 42 to 44 are sectional viewstaken along lines XLII-XLII, XLIII-XLIII, and XLIV-XLIV, respectively,in FIG. 41. Sectional positions of FIGS. 41 to 44 correspond to FIGS. 4to 7, respectively, in the first embodiment.

Referring mainly to FIG. 41, in the semiconductor device, indicated atSD7, of this seventh embodiment, third regions Ra3 are arranged two asone set in a zigzag fashion in a direction (the lateral direction inFIG. 41) orthogonal to the extending direction of the sealing ring SL.

As to the other points in configuration than the above, they are almostthe same as in the first embodiment. Therefore, the same orcorresponding elements are identified by the same reference numerals asin the first embodiment and explanations thereof will be omitted.

According to this seventh embodiment, as in the first embodiment, theoccurrence of a crack which is rectilinear in a direction (the lateraldirection in the drawing) orthogonal to the extending direction of thesealing ring SL and which does not undergo the action of third regionsRa3, between the sealing ring SL and the dicing face DS, is suppressed.This is also true of first and second regions Ra1, Ra2.

Eighth Embodiment

FIG. 45 is a partial sectional view showing schematically theconfiguration of a semiconductor device according to an eighthembodiment of the present invention. FIGS. 46 to 48 are schematicsectional views taken along lines XLVI-XLVI, XLVII-XLVII, andXLVIII-XLVIII, respectively, in FIG. 45. Sectional positions of FIGS. 45to 48 correspond to FIGS. 41 to 44, respectively, in the seventhembodiment.

Referring mainly to FIG. 45, in the semiconductor device, indicated atSD8, of this eighth embodiment, a planar layout of third regions Ra3comprise individual patterns arranged two as one set in a zigzag fashionin principle in a direction (the lateral direction in FIG. 45)orthogonal to the extending direction of the sealing ring SL. However,in the region defined by broken lines DC, a portion of the patterns aredropped out halfway in the layout, with third regions Ra3 being notformed therein, as indicated with dash-double dot lines. Also in planarlayouts of first and second regions Ra1, Ra2, like the above planarlayout of third regions Ra3, a portion of the patterns are dropped outhalfway in the layouts.

As to the other points in configuration than the above, they are almostthe same as in the seventh embodiment. Therefore, the same orcorresponding portions are identified by the same reference numerals asin the seventh embodiment and explanations thereof will be omitted.

According to this eighth embodiment there is obtained the same effect asin the seventh embodiment. Moreover, like the fourth embodiment, a crackcan be conducted upwards through the semiconductor device SD8 in a morepositive manner in the region defined by broken lines DC (FIG. 45).

Ninth Embodiment

FIG. 49 is a partial sectional view showing schematically theconfiguration of a semiconductor device according to a ninth embodimentof the present invention. FIGS. 50 to 52 are schematic sectional viewstaken along lines L-L, LI-LI, and LII-LII, respectively, in FIG. 49.Sectional positions of FIGS. 49 to 52 correspond to FIGS. 4 to 7,respectively, in the first embodiment.

Referring mainly to FIG. 49, the semiconductor device, indicated at SD9,of this ninth embodiment, third regions Ra3 has a layout in a directionAL orthogonal to the extending direction of the sealing ring SL and alayout in a direction deviated at an angle of TH relative to thedirection AL. First and second regions Ra1, Ra2 also have the samelayout in plan.

As to the other points in configuration than the above, they are almostthe same as in the first embodiment. Therefore, the same orcorresponding elements are identified by the same reference numerals asin the first embodiment and explanations thereof will be omitted.

According to this ninth embodiment, each of the layouts of the first,second and third regions Ra1, Ra2, Ra3 includes the layout in thedirection deviated at the angle TH relative to the direction AL. Withthis layout, a crack advancing in the direction AL is prevented fromreaching the sealing ring SL rectilinearly through only an interlayerdielectric film from the dicing face DS.

Like the semiconductor devices SD1 and SD2 of the first and secondembodiments, the semiconductor devices SD3 to SD9 of the third to ninthembodiments have the insulation films 75, 76, wiring 77, protective film78, opening OP, layer M1 and the structure (the semiconductor substrateSB side) underlying the layer M1 (those are not shown in the third toninth embodiments).

It should be understood that the above embodiments are illustrative andnot limitative in all the points. The scope of the present invention isdefined not by the above description but by the scope of the appendedclaims. It is intended that there are included all changes in themeaning and scope equivalent to the scope of the appended claims.

The present invention is applicable particularly advantageously to asemiconductor device having a sealing ring which surrounds a chipregion, as well as a method for manufacturing the semiconductor device.

1. A semiconductor device comprising: a chip region; a sealing ringregion which surrounds the chip region in plan; and a dummy region whichsurrounds an outer periphery of the sealing ring region in plan, thedummy region comprising: a semiconductor substrate; a first laminatewhich is provided over the semiconductor substrate and includes a firstinterlayer dielectric film having a first mechanical strength; a secondlaminate which is provided over the first laminate and includes a secondinterlayer dielectric film having a mechanical strength higher than thefirst mechanical strength; at least one first region, the first regionincluding a plurality of first metallic layers which are provided withinthe first laminate so as to mutually overlap in plan, and the firstregion also including vias for mutually coupling the first metalliclayers; and at least one second region, the second region including aplurality of second metallic layers which are provided within the secondlaminate so as to mutually overlap in plan, and the second region alsoincluding vias for mutually coupling the second metallic layers, thesecond region overlapping at least a part of the first region in plan,being not coupled with the first region by vias, and sandwiching thesecond interlayer dielectric film between the second region and thefirst region.
 2. A semiconductor device according to claim 1, whereinthe second region is provided at a position deviated from the positionof the first region so as to be spaced away from the sealing ring regionin plan.
 3. A semiconductor device according to claim 1, wherein each ofthe first metallic layers has four sides in plan, and wherein the viasfor mutually coupling the first metallic layers are arranged along thefour sides in plan.
 4. A semiconductor device comprising: a chip region;a sealing ring region which surrounds the chip region in plan; and adummy region which surrounds an outer periphery of the sealing ringregion in plan, the dummy region comprising: a semiconductor substrate;a first laminate which is provided over the semiconductor substrate andincludes a first interlayer dielectric film having a first mechanicalstrength; a second laminate which is provided over the first laminateand includes a second interlayer dielectric film having a mechanicalstrength higher than the first mechanical strength; at least one firstregion including a plurality of first metallic layers which are providedwithin the first laminate so as to mutually overlap in plan; and atleast one second region including a plurality of second metallic layerswhich are provided within the second laminate so as to mutually overlapin plan, the second region, when seen in plan, being provided at aposition deviated from the first region so as to overlap a part of thefirst region and be spaced away from the sealing ring region.
 5. Asemiconductor device according to claim 1, wherein, when seen in plan,each of the first and second regions occupies an area ranging from 30%to 50% and has a pattern with an area ranging from 1 to 4 squaremicrometers.
 6. A semiconductor device according to claim 1, furthercomprising an interlayer dielectric film provided between thesemiconductor substrate and the first laminate and having a mechanicalstrength higher than the first mechanical strength.
 7. A semiconductordevice according to claim 1, wherein the first metallic layers arearranged in a mutually completely superimposed manner while assuming oneand same shape in shape in plan, and the second metallic layers are alsoarranged in a mutually completely superimposed manner while assuming oneand same shape in plan.
 8. A semiconductor device according to claim 7,wherein the at least one first region includes a plurality of firstregions, the at least one second region includes a plurality of secondregions, the first regions formed in adjacent rows, when seen in plan,being shifted a predetermined pitch from each other and thereby arrangedin a zigzag fashion.
 9. A method for manufacturing a semiconductordevice, comprising the steps of: forming a wafer, the wafer comprising achip region, a sealing ring region which surrounds the chip region inplan, and a dummy region which surrounds an outer periphery of thesealing ring region in plan; and cutting the wafer along an outerperiphery of the dummy region, the dummy region comprising: asemiconductor substrate; a first laminate which is provided over thesemiconductor substrate and includes a first interlayer dielectric filmhaving a first mechanical strength; a second laminate which is providedover the first laminate and includes a second interlayer dielectric filmhaving a mechanical strength higher than the first mechanical strength;a first region, the first region including a plurality of first metalliclayers which are provided within the first laminate so as to mutuallyoverlap in plan, and the first region also including vias for mutuallycoupling the first metallic layers; and a second region, the secondregion including a plurality of metallic layers which are providedwithin the second laminate so as to mutually overlap in plan, and thesecond region also including vias for mutually coupling the secondmetallic layers, the second region overlapping at least a part of thefirst region in plan, being not coupled with the first region by vias,and sandwiching the second interlayer dielectric film between the secondregion and the first region.
 10. A method according to claim 9, whereinthe second region is provided at a position deviated from the positionof the first region so as to be spaced away from the sealing ring regionin plan.
 11. A method for manufacturing a semiconductor device,comprising the steps of: forming a wafer, the wafer comprising a chipregion, a sealing ring region which surrounds the chip region, and adummy region which surrounds an outer periphery of the sealing ringregion; and cutting the wafer along an outer periphery of the dummyregion, the dummy region comprising: a semiconductor substrate; a firstlaminate which is provided over the semiconductor substrate and includesa first interlayer dielectric film having a first mechanical strength; asecond laminate which is provided over the first laminate and includes asecond interlayer dielectric film having a mechanical strength higherthan the first mechanical strength; a first region including a pluralityof first metallic layers which are provided within the first laminate soas to mutually overlap in plan; and a second region including aplurality of second metallic layers which are provided within the secondlaminate so as to mutually overlap in plan, the second region, when seenin plan, being provided at a position deviated from the position of thefirst region so as to overlap a part of the first region and be spacedaway from the sealing ring region.
 12. A method according to claim 9,wherein each of the first and second regions, when seen in plan,occupies an area ranging from 30% to 50% and has a pattern with an arearanging from 1 to 4 micrometers.
 13. A method according to claim 9,wherein the dummy region comprises a third interlayer dielectric filmprovided between the semiconductor substrate and the first laminate andhaving a mechanical strength higher than the first mechanical strength.